Thierry Germany
Femto Version 1
Control Cabinet:
W 310 mm H 330 mm D 420 mm
Chamber:
Ø 3.9 in, L 10.9 in
Chamber Volume:
2
Gas Supply:
1 gas channel via needle valve
Generator:
1 pc. with 40 kHz
(optional: 13.56 MHz or 2.45 GHz)
Control:
Semi-Automatic
Femto Version 2
Control Cabinet:
W 310 mm H 330 mm D 420 mm
Chamber:
Ø 3.9 in, L 10.9 in
Chamber Volume:
2
Gas Supply:
1 gas channel via needle valve
Generator:
1 pc. with 40 kHz
(optional: 13.56 MHz or 2.45 GHz)
Control:
Semi-Automatic
Femto Version 3
Control Cabinet:
W 310 mm H 330 mm D 420 mm
Chamber:
Ø 3.9 in, L 10.9 in
Chamber Volume:
2
Gas Supply:
2 gas channel via needle valve
Generator:
1 pc. with 40 kHz
(optional: 13.56 MHz or 2.45 GHz)
Control:
Semi-Automatic
Femto Version 4
Control Cabinet:
W 310 mm H 560 mm D 420 mm
Chamber:
Ø 3.9 in, L 10.9 in
Chamber Volume:
2
Gas Supply:
2 gas channel via needle valve
Generator:
1 pc. with 40 kHz
(optional: 13.56 MHz or 2.45 GHz)
Control:
Semi-Automatic
Femto Version 5
Control Cabinet:
W 310 mm H 330 mm D 420 mm
Chamber:
Ø 3.9 in, L 10.9 in
Chamber Volume:
2
Gas Supply:
Mass flow controllers
Generator:
1 pc. with 40 kHz
(optional: 13.56 MHz or 2.45 GHz)
Control:
Touch Screen
Femto Version 6
Control Cabinet:
W 560 mm H 560 mm D 420 mm
Chamber:
Ø 3.9 in, L 10.9 in
Chamber Volume:
2
Gas Supply:
1 gas channel via needle valve
Generator:
1 pc. with 40 kHz
(optional: 13.56 MHz or 2.45 GHz)
Control:
Semi-Automatic
Femto Version 7
Control Cabinet:
W 560 mm H 560 mm D 420 mm
Chamber:
Ø 3.9 in, L 10.9 in
Chamber Volume:
2
Gas Supply:
Mass flow controllers
Generator:
1 pc. with 40 kHz
(optional: 13.56 MHz or 2.45 GHz)
Control:
Touch Screen
Femto Version 8
Control Cabinet:
W 600 mm H 1700 mm D 800 mm
Chamber:
Ø 3.9 in, L 10.9 in
Chamber Volume:
2
Gas Supply:
Mass flow controllers
Generator:
1 pc. with 40 kHz
(optional: 13.56 MHz or 2.45 GHz)
Control:
PC
Pico Version 1
Control Cabinet:
W 310 mm H 330 mm D 420 mm
Chamber:
Ø 5.9 in, L 12.6 in
Chamber Volume:
5
Gas Supply:
2 gas channel via needle valve
Generator:
1 pc. with 40 kHz
(optional: 13.56 MHz or 2.45 GHz)
Control:
Semi-Automatic
Pico Version 2
Control Cabinet:
W 560 mm H 560 mm D 420 mm
Chamber:
Ø 5.9 in, L 12.6 in
Chamber Volume:
5
Gas Supply:
2 gas channel via needle valve
Generator:
1 pc. with 40 kHz
(optional: 13.56 MHz or 2.45 GHz)
Control:
Semi-Automatic
Pico Version 3
Control Cabinet:
W 560 mm H 560 mm D 420 mm
Chamber:
Ø 5.9 in, L 12.6 in
Chamber Volume:
5
Gas Supply:
2 gas channel via needle valve
Generator:
1 pc. with 40 kHz
(optional: 13.56 MHz or 2.45 GHz)
Control:
Semi-Automatic
Pico Version 4
Control Cabinet:
W 310 mm H 330 mm D 420 mm
Chamber:
Ø 5.9 in, L 12.6 in
Chamber Volume:
5
Gas Supply:
Mass flow controllers
Generator:
1 pc. with 40 kHz
(optional: 13.56 MHz or 2.45 GHz)
Control:
Touch Screen
Pico Version 5
Control Cabinet:
W 560 mm H 600 mm D 420 mm
Chamber:
Ø 5.9 in, L 12.6 in
Chamber Volume:
5
Gas Supply:
3 gas channel via needle valve
Generator:
1 pc. with 40 kHz
(optional: 13.56 MHz or 2.45 GHz)
Control:
Semi-Automatic
Pico Version 6
Control Cabinet:
W 560 mm H 600 mm D 420 mm
Chamber:
Ø 5.9 in, L 12.6 in
Chamber Volume:
5
Gas Supply:
2 gas channel via needle valve
Generator:
1 pc. with 40 kHz
(optional: 13.56 MHz or 2.45 GHz)
Control:
Semi-Automatic
Pico Version 7
Control Cabinet:
W 600 mm H 1700 mm D 800 mm
Chamber:
Ø 5.9 in, L 12.6 in
Chamber Volume:
5
Gas Supply:
Mass flow controllers
Generator:
1 pc. with 40 kHz
(optional: 13.56 MHz or 2.45 GHz)
Control:
PC
Nano Version 1
Control Cabinet:
W 560 mm H 600 mm D 600 mm
Chamber:
Ø 10.5 in, L 16.5 in
Chamber Volume:
24
Gas Supply:
2 gas channel via needle valve
Generator:
1 pc. with 40 kHz
(optional: 13.56 MHz or 2.45 GHz)
Control:
Semi-Automatic
Nano Version 2
Control Cabinet:
W 560 mm H 600 mm D 600 mm
Chamber:
Ø 10.5 in, L 16.5 in
Chamber Volume:
24
Gas Supply:
2 gas channel via needle valve
Generator:
1 pc. with 40 kHz
(optional: 13.56 MHz or 2.45 GHz)
Control:
Semi-Automatic
Nano Version 3
Control Cabinet:
W 560 mm H 600 mm D 600 mm
Chamber:
Ø 10.5 in, L 16.5 in
Chamber Volume:
24
Gas Supply:
2 gas channel via needle valve
Generator:
1 pc. with 40 kHz
(optional: 13.56 MHz or 2.45 GHz)
Control:
Semi-Automatic
Nano Version 4
Control Cabinet:
W 560 mm H 600 mm D 600 mm
Chamber:
Ø 10.5 in, L 16.5 in
Chamber Volume:
24
Gas Supply:
Mass flow controllers
Generator:
1 pc. with 40 kHz
(optional: 13.56 MHz or 2.45 GHz)
Control:
Touch Screen
Nano Version 5
Control Cabinet:
W 600 mm H 1700 mm D 800 mm
Chamber:
Ø 10.5 in, L 16.5 in
Chamber Volume:
24
Gas Supply:
2 gas channel via needle valve
Generator:
1 pc. with 40 kHz
(optional: 13.56 MHz or 2.45 GHz)
Control:
Semi-Automatic
Nano Version 6
Control Cabinet:
W 600 mm H 1700 mm D 800 mm
Chamber:
Ø 10.5 in, L 16.5 in
Chamber Volume:
24
Gas Supply:
Mass flow controllers
Generator:
1 pc. with 40 kHz
(optional: 13.56 MHz or 2.45 GHz)
Control:
PC
Tetra 30 PCCE
Control Cabinet:
W 600 mm H 1700 mm D 800 mm
Chamber:
W 12" x H 11.8" x D 14.6"
Chamber Volume:
30
Gas Supply:
Mass flow controllers
Generator:
1 pc. with 40 kHz
(optional: 13.56 MHz or 2.45 GHz)
Control:
Touch Screen
Tetra 30 PC
Control Cabinet:
W 600 mm H 1700 mm D 800 mm
Chamber:
W 12" x H 11.8" x D 14.6"
Chamber Volume:
30
Gas Supply:
Mass flow controllers
Generator:
1 pc. with 40 kHz
(optional: 13.56 MHz or 2.45 GHz)
Control:
PC
Tetra 50 PCCE
Control Cabinet:
W 600 mm H 1700 mm D 800 mm
Chamber:
W 12" x H 11.8" x D 24.6"
Chamber Volume:
50
Gas Supply:
Mass flow controllers
Generator:
1 pc. with 40 kHz
(optional: 13.56 MHz or 2.45 GHz)
Control:
Touch Screen
Tetra 50 LF PC
Control Cabinet:
W 600 mm H 1700 mm D 800 mm
Chamber:
W 12" x H 11.8" x D 24.6"
Chamber Volume:
50
Gas Supply:
Mass flow controllers
Generator:
1 pc. with 40 kHz
(optional: 13.56 MHz or 2.45 GHz)
Control:
PC
Tetra 100 PCCE
Control Cabinet:
W 600 mm H 1700 mm D 800 mm
Chamber:
W 15.8" x H 15.8" x D 24.6"
Chamber Volume:
100
Gas Supply:
Mass flow controllers
Generator:
1 pc. with 40 kHz
(optional: 13.56 MHz or 2.45 GHz)
Control:
Touch Screen
Tetra 100 PC
Control Cabinet:
W 600 mm H 1700 mm D 800 mm
Chamber:
W 15.8" x H 15.8" x D 24.6"
Chamber Volume:
100
Gas Supply:
Mass flow controllers
Generator:
1 pc. with 40 kHz
(optional: 13.56 MHz or 2.45 GHz)
Control:
PC
Tetra 150 PCCE
Control Cabinet:
W 600 mm H 2100 mm D 800 mm
Chamber:
W 15.8" x H 23.6" x D 24.6"
Chamber Volume:
150
Gas Supply:
Mass flow controllers
Generator:
1 pc. with 40 kHz
(optional: 13.56 MHz or 2.45 GHz)
Control:
Touch Screen
Tetra 150 PC
Control Cabinet:
W 600 mm H 2100 mm D 800 mm
Chamber:
W 15.8" x H 23.6" x D 24.6"
Chamber Volume:
150
Gas Supply:
Mass flow controllers
Generator:
1 pc. with 40 kHz
(optional: 13.56 MHz or 2.45 GHz)
Control:
PC
Special Tetra 15-LF-PC
Control Cabinet:
W 600 mm H 1700 mm D 800 mm
Chamber:
Chamber Volume:
15
Gas Supply:
Mass flow controllers
Generator:
1 pc. with 40 kHz
(optional: 13.56 MHz or 2.45 GHz)
Control:
PC
Special Tetra 30-LF-PC
Control Cabinet:
W 600 mm H 1700 mm D 800 mm
Chamber:
W 12" x H 11.8" x D 14.6"
Chamber Volume:
30
Gas Supply:
Mass flow controllers
Generator:
1 pc. with 40 kHz
(optional: 13.56 MHz or 2.45 GHz)
Control:
PC
Special Tetra 100-LF-PC
Control Cabinet:
W 600 mm H 1700 mm D 800 mm
Chamber:
W 15.8" x H 15.8" x D 24.6"
Chamber Volume:
100
Gas Supply:
Mass flow controllers
Generator:
1 pc. with 40 kHz
(optional: 13.56 MHz or 2.45 GHz)
Control:
PC
Special Tetra 120-LF-PC
Control Cabinet:
W 600 mm H 1700 mm D 800 mm
Chamber:
Chamber Volume:
120
Gas Supply:
Mass flow controllers
Generator:
1 pc. with 40 kHz
(optional: 13.56 MHz or 2.45 GHz)
Control:
PC
Special Tetra 130-LF-PC
Control Cabinet:
W 600 mm H 1700 mm D 800 mm
Chamber:
Chamber Volume:
Gas Supply:
Mass flow controllers
Generator:
1 pc. with 40 kHz
(optional: 13.56 MHz or 2.45 GHz)
Control:
PC
Special Tetra 140-LF-PC
Control Cabinet:
W 600 mm H 1700 mm D 800 mm
Chamber:
Chamber Volume:
140
Gas Supply:
Mass flow controllers
Generator:
1 pc. with 40 kHz
(optional: 13.56 MHz or 2.45 GHz)
Control:
PC
Special Tetra 140-LF-PC-2
Control Cabinet:
W 600 mm H 1700 mm D 800 mm
Chamber:
Chamber Volume:
140
Gas Supply:
Mass flow controllers
Generator:
1 pc. with 40 kHz
(optional: 13.56 MHz or 2.45 GHz)
Control:
PC
Special Tetra 150-LF-PC
Control Cabinet:
W 600 mm H 2100 mm D 800 mm
Chamber:
W 15.8" x H 23.6" x D 24.6"
Chamber Volume:
150
Gas Supply:
Mass flow controllers
Generator:
1 pc. with 40 kHz
(optional: 13.56 MHz or 2.45 GHz)
Control:
PC
Special Tetra 240-LF-PC
Control Cabinet:
W 870 mm H 1860 mm D 1400 mm
Chamber:
Chamber Volume:
240
Gas Supply:
Mass flow controllers
Generator:
1 pc. with 40 kHz
(optional: 13.56 MHz or 2.45 GHz)
Control:
PC
Special Tetra 260-LF-PC
Control Cabinet:
W 870 mm H 1860 mm D 1400 mm
Chamber:
Chamber Volume:
260
Gas Supply:
Mass flow controllers
Generator:
1 pc. with 40 kHz
(optional: 13.56 MHz or 2.45 GHz)
Control:
PC
Special Tetra 375-LF-PC
Control Cabinet:
W 870 mm H 1860 mm D 1400 mm
Chamber:
Chamber Volume:
375
Gas Supply:
Mass flow controllers
Generator:
1 pc. with 40 kHz
(optional: 13.56 MHz or 2.45 GHz)
Control:
PC
Special Tetra 400-LF-PC
Control Cabinet:
W 600 mm H 2100 mm D 800 mm
Chamber:
Chamber Volume:
400
Gas Supply:
Mass flow controllers
Generator:
1 pc. with 40 kHz
(optional: 13.56 MHz or 2.45 GHz)
Control:
PC
Special Tetra 420-LF-PC-PCB
Control Cabinet:
W 600 mm H 2100 mm D 800 mm
Chamber:
Chamber Volume:
420
Gas Supply:
Mass flow controllers
Generator:
1 pc. with 40 kHz
(optional: 13.56 MHz or 2.45 GHz)
Control:
PC
Special Tetra 500-LF-PC
Control Cabinet:
W 600 mm H 2100 mm D 800 mm
Chamber:
Chamber Volume:
500
Gas Supply:
Mass flow controllers
Generator:
1 pc. with 40 kHz
(optional: 13.56 MHz or 2.45 GHz)
Control:
PC
Special Tetra 575-LF-PC
Control Cabinet:
W 600 mm H 2100 mm D 800 mm
Chamber:
Chamber Volume:
575
Gas Supply:
Mass flow controllers
Generator:
1 pc. with 40 kHz
(optional: 13.56 MHz or 2.45 GHz)
Control:
PC
Special Tetra 600-LF-PC
Control Cabinet:
W 600 mm H 2100 mm D 800 mm
Chamber:
Chamber Volume:
600
Gas Supply:
Mass flow controllers
Generator:
1 pc. with 40 kHz
(optional: 13.56 MHz or 2.45 GHz)
Control:
PC
Special Tetra 600-LF-PC-D V1
Control Cabinet:
W 600 mm H 2100 mm D 800 mm
Chamber:
Chamber Volume:
600
Gas Supply:
Mass flow controllers
Generator:
1 pc. with 40 kHz
(optional: 13.56 MHz or 2.45 GHz)
Control:
PC
Special Tetra 600-LF-PC-D V 2
Control Cabinet:
W 600 mm H 2100 mm D 800 mm
Chamber:
Chamber Volume:
600
Gas Supply:
Mass flow controllers
Generator:
1 pc. with 40 kHz
(optional: 13.56 MHz or 2.45 GHz)
Control:
PC
Special Tetra 2000-RF-PC
Control Cabinet:
W 600 mm H 2100 mm D 800 mm
Chamber:
Chamber Volume:
2000
Gas Supply:
Mass flow controllers
Generator:
1 pc. with 40 kHz
(optional: 13.56 MHz or 2.45 GHz)
Control:
PC
Special Tetra 2400-LF-PC
Control Cabinet:
W 600 mm H 2100 mm D 800 mm
Chamber:
Chamber Volume:
2400
Gas Supply:
Mass flow controllers
Generator:
1 pc. with 40 kHz
(optional: 13.56 MHz or 2.45 GHz)
Control:
PC
Special Tetra 2800-LF-PC
Control Cabinet:
W 600 mm H 2100 mm D 800 mm
Chamber:
Chamber Volume:
2800
Gas Supply:
Mass flow controllers
Generator:
1 pc. with 40 kHz
(optional: 13.56 MHz or 2.45 GHz)
Control:
PC
Special Tetra 4400-LF-PC
Control Cabinet:
W 600 mm H 2100 mm D 800 mm
Chamber:
Chamber Volume:
4400
Gas Supply:
Mass flow controllers
Generator:
1 pc. with 40 kHz
(optional: 13.56 MHz or 2.45 GHz)
Control:
PC
Special Tetra 5600-LF-PC
Control Cabinet:
W 600 mm H 2100 mm D 800 mm
Chamber:
Chamber Volume:
5600
Gas Supply:
Mass flow controllers
Generator:
1 pc. with 40 kHz
(optional: 13.56 MHz or 2.45 GHz)
Control:
PC
Special Tetra 7000-LF-PC
Control Cabinet:
W 600 mm H 2100 mm D 800 mm
Chamber:
Chamber Volume:
7000
Gas Supply:
Mass flow controllers
Generator:
1 pc. with 40 kHz
(optional: 13.56 MHz or 2.45 GHz)
Control:
PC
Special Tetra 7500-LF-PC
Control Cabinet:
W 600 mm H 2100 mm D 800 mm
Chamber:
Chamber Volume:
7500
Gas Supply:
Mass flow controllers
Generator:
1 pc. with 40 kHz
(optional: 13.56 MHz or 2.45 GHz)
Control:
PC
Special Tetra 8000-LF-PC
Control Cabinet:
W 600 mm H 2100 mm D 800 mm
Chamber:
Chamber Volume:
8000
Gas Supply:
Mass flow controllers
Generator:
1 pc. with 40 kHz
(optional: 13.56 MHz or 2.45 GHz)
Control:
PC
Special Tetra 12600-LF-PC
Control Cabinet:
W 600 mm H 2100 mm D 800 mm
Chamber:
Chamber Volume:
12600
Gas Supply:
Mass flow controllers
Generator:
1 pc. with 40 kHz
(optional: 13.56 MHz or 2.45 GHz)
Control:
PC
Yocto Version 1
Control Cabinet:
W 150 mm H 100 mm D 450 mm
Chamber:
Ø 1.97 in, L 5.9 in
Chamber Volume:
.3
Gas Supply:
1 gas channel via needle valve
Generator:
1 pc. with 40 kHz
Control:
Semi-Automatic
Zepto Version 1
Control Cabinet:
W 425 mm H 185 mm D 450 mm
Chamber:
Ø 4.1 in, L 11.8 in
Chamber Volume:
2.6
Gas Supply:
1 gas channel via needle valve
Generator:
1 pc. with 40 kHz
(optional: 13.56 MHz)
Control:
Semi-Automatic
Zepto Version 2
Control Cabinet:
W 425 mm H 185 mm D 450 mm
Chamber:
Ø 4.1 in, L 11.8 in
Chamber Volume:
2.6
Gas Supply:
Mass flow controllers
Generator:
1 pc. with 40 kHz
(optional: 13.56 MHz)
Control:
Rotary Control
Zepto Version 3
Control Cabinet:
W 425 mm H 185 mm D 450 mm
Chamber:
Ø 4.1 in, L 11.8 in
Chamber Volume:
2.6
Gas Supply:
Mass flow controllers
Generator:
1 pc. with 40 kHz
(optional: 13.56 MHz)
Control:
Touch Screen
Zepto Version 4
Control Cabinet:
W 425 mm H 185 mm D 450 mm
Chamber:
Ø 4.1 in, L 11.8 in
Chamber Volume:
2.6
Gas Supply:
Mass flow controllers
Generator:
1 pc. with 40 kHz
(optional: 13.56 MHz)
Control:
External PC
Atto Version 1
Control Cabinet:
W 425 mm H 275 mm D 450 mm
Chamber:
Ø 8.3 in, L 11.8 in
Chamber Volume:
10.5
Gas Supply:
1 gas channel via needle valve
Generator:
1 pc. with 40 kHz
(optional: 13.56 MHz)
Control:
Semi-Automatic
Atto Version 2
Control Cabinet:
W 425 mm H 275 mm D 450 mm
Chamber:
Ø 8.3 in, L 11.8 in
Chamber Volume:
10.5
Gas Supply:
Mass flow controllers
Generator:
1 pc. with 40 kHz
(optional: 13.56 MHz)
Control:
Rotary Control
Atto Version 3
Control Cabinet:
W 425 mm H 275 mm D 450 mm
Chamber:
Ø 8.3 in, L 11.8 in
Chamber Volume:
10.5
Gas Supply:
Mass flow controllers
Generator:
1 pc. with 40 kHz
(optional: 13.56 MHz)
Control:
Touch Screen
APC 500 Corona Plasma Source
Control Cabinet:
W 562 mm H 211 mm D 450 mm
Chamber:
Chamber Volume:
Gas Supply:
Generator:
1 pc. with 40 kHz
Control:
Semi-Automatic
Plasma Beam
Control Cabinet:
W 562 mm H 211 mm D 450 mm
Chamber:
Chamber Volume:
Gas Supply:
Generator:
1 pc. with 40 kHz
Control:
Semi-Automatic
Plasma Beam PC
Control Cabinet:
W 562 mm H 211 mm D 450 mm
Chamber:
Chamber Volume:
Gas Supply:
Generator:
1 pc. with 40 kHz
Control:
PC
Plasma Beam Duo
Control Cabinet:
W 562 mm H 211 mm D 450 mm
Chamber:
Chamber Volume:
Gas Supply:
Generator:
1 pc. with 40 kHz
Control:
Semi-Automatic
Plasma Beam Duo
Control Cabinet:
W 562 mm H 360 mm D 650 mm
Chamber:
Chamber Volume:
Gas Supply:
Generator:
1 pc. with 40 kHz
Control:
PC
Tetra 45 PC
Control Cabinet:
W 875mm D 1000 mm H 1700 mm
Chamber:
W 572 mm D 650 mm H 125 mm
Chamber Volume:
45
Gas Supply:
2 - 6 MFCs
Generator:
80 Khz – 1000 watts
(13.56 Mhz)
Control:
PC
Tetra 320r
Control Cabinet:
W 870 mm, H (with feet) 1860 mm, D 1400 mm
Chamber:
∅ 640 mm, D 1000 mm
Chamber Volume:
320
Gas Supply:
2 - 6 MFCs
Generator:
80 kHz - 300 Watt
(13.56 MHz)
Control:
PC
Tetra 3600
Control Cabinet:
Chamber:
Chamber Volume:
3600
Gas Supply:
Generator:
Control:
PC
Plasma Beam Quatro
Control Cabinet:
W 560mm, H 355mm, D 540mm
Chamber:
Chamber Volume:
Gas Supply:
Generator:
4 pc. with 20 kHz
Control:
Semi-Automatic
Plasma Beam RT
Control Cabinet:
W 189 mm, H 600mm, D 192mm
Chamber:
Chamber Volume:
Gas Supply:
Generator:
2 pc. with 20 kHz
Control:
Touch Screen