Process Control Units for Plasma Systems  

• Fully computer-controlled process steering
• Integrated PC control system
• Windows 10 IoT as the standard operating system (other operating systems can be delivered on request)
• Compressed-air monitoring included
• The control can handle up to 100 automatic processes, each with 10 sub-programs
• Process data can be saved as an Excel file or as a diagram
• Automatic data export to another network computer via the integrated network board
• The user can choose from two modes:
  • Manual mode: Allows manual adjustments to the system via a dialogue interface
  • Automatic mode: Executes a previously set process automatically
  • The user can vary the following free parameters: Starting pressure for the process, max. pump-down time, working pressure, gas flow rates and their ratios (in case of gas mixtures), stabilization time, HF duration and output, rinse and ventilation time
  • The user can set error limits for gas flow rates, working gas pressure and HF output for MHz or rf plasma
• Integrated PI/PID controller allows a digital pressure control, i.e. not only the gas flows are constant but also the working gas pressure
• Real-time pressure control over the entire duration of the plasma process
• Advanced safety settings: E.g. the control unit is disabled during the opening of the vacuum system
• A full overview of the vacuum chamber settings: The state of the door switch, temperature safety switch and vacuum switch are displayed.
• An individual batch number and the name of the operator can be entered
• Individual maintenance intervals can be programmed, depending on the operation schedule
• The sensitivity of the pressure control is adjustable
• All alarms are saved into an alarm archive for further inspection
• The systems provide detailed error messages, e.g. the actual gas flow of gas 1 heavily deviates from the set point
• All diagrams can be displayed in full-screen mode
• Re(programming) of the system is only possible with the correct password (for safety reasons)
• All saved process routines as well as the file information can be retrieved at any time from the data archive
• Process intervals can be defined for the rotary drum (e.g. rotate 30 sec., stop 60 sec., rotate 30 sec., etc.)
• Full control of the gas supply by the specification of the set points for the mass flow controllers (MFC), while the actual current values are shown on the display
• Settings can be made process-independent but dependent on the system and on customers’ needs (gas types, mass flow controllers, pressure regulators, cooling water, storage location and type)
• The control unit comes with English and German as standard languages but other languages can be added optionally upon request
• The control is equipped with a red and green signal light

The following options are available on request:

• Electrode monitoring: Manages different electrodes and electrode configurations (e.g. electrodes for the rotary drum or tier electrodes)
• Marking the end of a process by an acoustic signal
• Evaporator timing
• Temperature indicators can be regulated
• Real-time Readout of the cooling water temperature
• Remote process diagnosis
• Printout of the log file via a standard printer (note that the printer is not included in the delivery of the control unit)
• Customizable diagram layout
• Additional monitoring for the DC bias source
• Bar code reader
• Pulsed HF generator
• Extra temperature display

• The standard control unit has a 3.5” TFT touch screen display, which can be upgraded to a 7” display. The fully colored user interface has a Windows look to enable easy and intuitive usage. While normal LCD displays come without touch function, our display needs no additional keyboard, or other add-ons.
• Windows CE operating system
• Two modes are available:
  • Manual mode:
    • All elements in the plasma process can be switched on and off just by touching the corresponding icon.
    • Individual set points for the process steps can be set via the touch screen
    • Each set point can be adjusted in a context menu on the touch screen by using the virtual +/- switches.
  • Automatic mode:
    • Up to 50 individual programs can be created, which can then run automatically
    • No need for an external PC or laptop, the programs can be entered directly via the touch screen
    • Each program can be named individually
    • All relevant processes can be read out chronologically in a separate curve chart
• The main screen shows the current process step and the elapsed time
• The device has an alarm list for error detection and displays alarms or malfunctions with flashing LEDs.
• The control unit has two default languages (English and German), other languages can be requested
• The device has an Ethernet connection for remote access
• Programs, alarms, process parameters, etc. can be stored on USB sticks via the provided port
• There are no mechanical parts like fans or hard discs in the control unit, which makes it maintenance-free
• Extremely short hard- and software boot time
• Data from the plasma process can be saved on a memory card within the control unit (txt format) and transferred to a USB stick. If the Data logging option has been ordered, the stored data can be read out directly, e. g. in Excel.
• The touch panel control unit can be remote-controlled from external devices via Ethernet (note that this requires the order of the remote-control option)
• If MHz plasma sources are used, a FULL PC controlled is strongly recommended